Evaluation of a-IGZO TFTs fabricated with low-temperature-annealed process

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

Thu. Sep 18, 2014 1:15 PM - 5:30 PM A12 (E301)

3:00 PM - 3:15 PM

^○Yasuyuki Takanashi¹, Mototaka Ochi¹, Hiroshi Goto¹, Toshihiro Kugimiya¹ (Kobe Steel, LTD.¹)

Keywords:IGZO,TFT,低温プロセス