5:45 PM - 6:00 PM
[18p-A14-17] Effect of ion irradiation energy in GaN growth on the Ga-ion-implanted SiNx surface (II)
Keywords:イオンビーム,GaN,選択成長
Oral presentation
07. Beam Technology and Nanofabrication » 7.6 Ion beams
Thu. Sep 18, 2014 1:15 PM - 6:15 PM A14 (E305)
5:45 PM - 6:00 PM
Keywords:イオンビーム,GaN,選択成長