The 75th JSAP Autumn Meeting, 2014

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Oral presentation

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[18p-A14-1~18] 7.6 Ion beams

Thu. Sep 18, 2014 1:15 PM - 6:15 PM A14 (E305)

3:15 PM - 3:30 PM

[18p-A14-8] Study on Highly Sensitive MeV-SIMS Analysis using Chemical Assist Ionization

○Makiko Fujii1, Masakazu Kusakari1, Toshio Seki1, Takaaki Aoki1, Jiro Matsuo1 (Kyoto Univ.1)

Keywords:SIMS