The 75th JSAP Autumn Meeting, 2014

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Oral presentation

13. Semiconductors A (Silicon) » 13.4 Devices/Integration Technologies

[18p-A16-1~14] 13.4 Devices/Integration Technologies

Thu. Sep 18, 2014 1:30 PM - 5:15 PM A16 (E307)

1:45 PM - 2:00 PM

△ [18p-A16-2] A process technique for combining a FinFET and nanodisk array structures

○Takashi Tohara1, Kazuhiko Endo2, Yongxun Liu2, Makoto Igarashi3, Seiji Samukawa3, Meishoku Masahara2, Takashi Morie1 (Kyushu Inst.1, AIST2, Tohoku Univ.3)

Keywords:ナノディスクアレイ,FinFET