The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.4 Devices/Integration Technologies

[18p-A16-1~14] 13.4 Devices/Integration Technologies

Thu. Sep 18, 2014 1:30 PM - 5:15 PM A16 (E307)

3:45 PM - 4:00 PM

[18p-A16-9] Experimental Study on 2D-Si Layers for Future Several-nm CMOS (IX)

tomohisa mizuno1, takashi aoki1, yuuya suzuki1, yoshiki nagamine1, toshiyuki samezima2 (Kanagawa Univ1, Toukyounoukou Univ2)

Keywords:ドーパントの影響