[18p-A17-1~12] 15.6 IV-group-based compounds

[18p-A17-1] Interface reaction analysis of La2O3/SiN upon SiC substrate by ATR-FTIR

^○Yiming Lei¹, Shu Munekiyo¹, Kuniyuki Kakushima², Takamasa Kawanago², Yoshinori Kataoka², Akira Nishiyama², Nobuyuki Sugii², Hitoshi Wakabayash², Kazuo Tsutsui², Satoshi Yamakawa³, Hiroshi Iwai¹, Masayuki Huruhashi³, Naruhisa Miura³, Kenji Natori¹ (Tokyo Tech. FRC¹, Tokyo Tech. IGSSE², Mitsubishi Electric Corp.³)

Keywords:SiC,La-silicate