Role of water molecules in thermal oxidation of 4H-SiC(0001) substrates

Presentation information

Oral presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

Thu. Sep 18, 2014 2:00 PM - 5:15 PM A17 (E308)

3:00 PM - 3:15 PM

^○Daisuke Nagai¹, Takuji Hosoi¹, Takayoshi Shimura¹, Heiji Watanabe¹ (Osaka Univ.¹)

Keywords:SiC,wet oxidation,MOS