The 75th JSAP Autumn Meeting, 2014

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Oral presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

[18p-A17-1~12] 15.6 IV-group-based compounds

Thu. Sep 18, 2014 2:00 PM - 5:15 PM A17 (E308)

4:00 PM - 4:15 PM

[18p-A17-8] Room Temperature Process for Producing Silicon Carbide Thin Film on Silicon Surface

Azumi Hirooka1, Kohei Shioda1, Masaki Tsuji1, ○Hitoshi Habuka1 (Yokohama National Univ.1)

Keywords:炭化珪素薄膜