[18p-A19-1~14] 13.3 Si Process・Interconnect・MEMS・Integration

△ [18p-A19-1] Uncooled infrared sensors with using one dimensional plasmonic metamaterials for polarization selective function

^○(M2)Yosuke Takagawa¹, Shinpei Ogawa², Kyohei Masuda¹, Koichi Miyashita¹, Masafumi Kimata¹ (Ritsumeikan Univ¹, Mitsubishi Electric Corp²)

Keywords:赤外線センサ,偏光