The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[18p-A19-1~14] 13.3 Si Process・Interconnect・MEMS・Integration

Thu. Sep 18, 2014 2:00 PM - 5:45 PM A19 (E311)

2:15 PM - 2:30 PM

[18p-A19-2] High-performance three-dimensional plasmonic metamaterial absorbers for uncooled infrared sensors with advanced functions I

Shinpei Ogawa1, Daisuke Fujisawa1, Hisatoshi Hata1, Mitsuharu Uetsuki1, Koji Misaki1, Masafumi Kimata2 (Mitsubishi Electric Corp.1, Ritsumeikan Univ.2)

Keywords:赤外線センサ,plasmonics,metamaterial