[18p-A19-1~14] 13.3 Si Process・Interconnect・MEMS・Integration

[18p-A19-3] High-performance three-dimensional plasmonic metamaterial absorbers for uncooled infrared sensors with advanced functions II

^○Daisuke Fujisawa¹, Shinpei Ogawa¹, Hisatoshi Hata¹, Mitsuharu Uetsuki¹, Koji Misaki¹, Masafumi Kimata² (Mitsubishi Electric Corp.¹, Ritsumeikan Univ.²)

Keywords:赤外線センサ,Plasmonics,Metamaterial