The 75th JSAP Autumn Meeting, 2014

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Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[18p-A19-1~14] 13.3 Si Process・Interconnect・MEMS・Integration

Thu. Sep 18, 2014 2:00 PM - 5:45 PM A19 (E311)

4:30 PM - 4:45 PM

[18p-A19-10] Integration of metal/silicon dioxide microtube and glass pipette neuroprobe arrays

○(M1)Tomoyuki Matsuo1, Tomohiko Nakamura1, Masahiro Sakata1, Shouta Yamagiwa1, Hiroto Sawahata1, Makoto Ishida1,2, Takeshi Kawano1 (Toyohashi Tech.1, EIIRIS2)

Keywords:神経電極,光遺伝学,VLS