The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[18p-A19-1~14] 13.3 Si Process・Interconnect・MEMS・Integration

Thu. Sep 18, 2014 2:00 PM - 5:45 PM A19 (E311)

4:15 PM - 4:30 PM

[18p-A19-9] Vertically integrated extracellular microprobe array with buffer amplifiers

○(M1)hiroki makino1, kouhei asai1, masanori tanaka1, makoto isada1,2, takeshi kawano1 (Toyohashi Tech.1, EIIRIS.2)

Keywords:神経電極,VLS,細胞外電位記録