[18p-A8-1~20] 6.2 Carbon-based thin films

[18p-A8-17] A study on the corrosion resistance of hydrogenated amorphous carbon films under the applied voltage

^○Yasuyuki Nakaya¹, Sarayut Tunmee¹, XiaoLong Zhou¹, Keiji Komatsu¹, Ikumi Toda¹, Shigeo Ohshio¹, Hidetoshi Saitoh¹ (Nagaoka Univ. Tech.¹)

Keywords:電圧印加,水素化アモルファス炭素膜,腐食