The 75th JSAP Autumn Meeting, 2014

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Oral presentation

06. Thin Films and Surfaces » 6.2 Carbon-based thin films

[18p-A8-1~20] 6.2 Carbon-based thin films

Thu. Sep 18, 2014 1:15 PM - 7:00 PM A8 (E207)

6:15 PM - 6:30 PM

[18p-A8-18] 13C and Deuterium isotopic effect on amorphous carbon film properties

○Yutaro Suzuki1, Tsuneo Suzuki2, Kazuhiro Kanda3, Naoto Ohtake1, Hiroki Akasaka1 (Tokyo Inst. of Tech.1, Nagaoka Univ. of Tech.2, Univ. of Hyogo3)

Keywords:アモルファス炭素,同位体効果