[18p-PB10-1~11] 15.5 IV-group crystals and IV-IV-group mixed crystals

[18p-PB10-6] Study on crystal morphology and device characteristics of compressively strained Si/Si_1-xC_x/Si(001) structures grown on an ion-implanted Si(001) substrate

^○Ryo Nakagomi¹, Shoichiro Sakai¹, Kosuke Fujiwara¹, Hiroshi Furukawa¹, Keisuke Arimoto¹, Junji Yamanaka¹, Kiyokazu Nakagawa¹, Noritaka Usami², Yusuke Hoshi², Kentaro Sawano³ (CCST Univ. of Yamanashi¹, Nagoya Univ.², ARL Tokyo City Univ.³)

Keywords:半導体