The 75th JSAP Autumn Meeting, 2014

Presentation information

Poster presentation

15. Crystal Engineering » 15.5 IV-group crystals and IV-IV-group mixed crystals

[18p-PB10-1~11] 15.5 IV-group crystals and IV-IV-group mixed crystals

Thu. Sep 18, 2014 1:30 PM - 3:30 PM PB10 (Gymnasium2)

ポスター掲示時間13:30~15:30(PB10会場)

1:30 PM - 3:30 PM

[18p-PB10-5] Strained-Si Formation Technology Using SiGe Buffer Formed by Sputter Epitaxy Method

Akira Motohashi1, Nobumitsu Hirose2, Akihumi Kasamatsu2, Takashi Mimura2, Toshiaki Matsui2, Takahiro Tsukamoto1, Yoshiyuki Suda1 (Tokyo Univ. of Agric & Technol.1, National Institute of Information and Communications technology2)

Keywords:半導体