[18p-PB10-1~11] 15.5 IV-group crystals and IV-IV-group mixed crystals

[18p-PB10-7] Study on evaluations of morphological and electrical properties of strained Si/Si_1-XC_x/Si(001) structures during impurity activation processes

^○Kosuke Fujiwara¹, Shoichiro Sakai¹, Hiroshi Furukawa¹, Shigenori Inoue¹, Keisuke Arimoto¹, Junji Yamanaka¹, Kiyokazu Nakagawa¹, Noritaka Usami², Yusuke Hoshi², Kentaro Sawano³ (CCST Univ.of Yamanashi¹, Nagoya Univ.², ARL Tokyo City Univ.³)

Keywords:半導体