[18p-PB5-1~11] 8.3 Plasma deposition of thin film and surface treatment

[18p-PB5-7] Self-formation of ZnO nanoparticle domains by a coaxial gas-flow low-pressure pulse plasma

^○Hiroki Shirahata¹, Satoru Iizuka¹ (Tohoku Univ.¹)

Keywords:酸化亜鉛,ナノ粒子,プラズマスパッタリング