1:30 PM - 3:30 PM
[18p-PB5-8] Analysis of Plasma Interactions with Mist for Formation of ZnO Thin Films Using Atmospheric-Pressure Plasma Assisted Mist CVD
Keywords:ミストＣＶＤ
Presentation information
Poster presentation
08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment
[18p-PB5-1~11] 8.3 Plasma deposition of thin film and surface treatment
Thu. Sep 18, 2014 1:30 PM - 3:30 PM PB5 (Gymnasium2)
ポスター掲示時間13:30～15:30(PB5会場)