The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

13. Semiconductors A (Silicon) » 13.2 Insulator technology

[19a-A17-1~12] 13.2 Insulator technology

Fri. Sep 19, 2014 9:00 AM - 12:30 PM A17 (E308)

11:30 AM - 11:45 AM

[19a-A17-9] Optimization of SiN Composition Profile to Improve Erase-Retention Tradeoff in MONOS Memories

Shosuke Fujii1, Haruka Kusai1, Kiwamu Sakuma1, Masato Koyama1 (Toshiba1)

Keywords:不揮発メモリ