[19a-A19-1~13] 13.3 Si Process・Interconnect・MEMS・Integration

[19a-A19-5] Au induced crystallization for amorphicity modulated Ge on SiO₂

^○Hayato Okamoto¹, Masato Hori¹, Kenta Moto¹, Shin Sakiyama¹, Koudai Tomouchi¹, Hideyuki Hara², Hiroto Nishimura², Kenichiro Takakura¹, Isao Tsunoda¹ (Kumamoto National College of Technology¹, Bruker BioSpin K.K.²)

Keywords:ゲルマニウム,金属誘起成長,初期非晶質性