[19a-A19-1~13] 13.3 Si Process・Interconnect・MEMS・Integration

[19a-A19-7] Electrical Properties Evaluation of Very Narrow Si Strips Crystallized by Micro-Thermal-Plasma-Jet and Its Application to Thin Film Transistors

^○(M2)Shogo Yamamoto¹, Seiji Morisaki¹, Shohei Hayashi¹, Taichi Nakatani¹, Seiichiro Higashi¹ (Graduate School of Advanced Sciences of Matter, Hiroshima Univ.¹)

Keywords:マイクロ熱プラズマジェット,薄膜トランジスタ