[19a-PB1-1~23] 6.2 Carbon-based thin films

[19a-PB1-15] Selective formation of atomically flat diamond (111) surface by hydrogen plasma treatment

^○Hiroki Kuroshima¹, Norio Tokuda^1,2,3, Toshiharu Makino^2,3, Satoshi Yamasaki^2,3, Takao Inokuma¹ (Kanazawa Univ¹, AIST², JST,CREST³)

Keywords:ダイヤモンド,水素プラズマ,エッチング