The 75th JSAP Autumn Meeting, 2014

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Poster presentation

06. Thin Films and Surfaces » 6.4 New thin-film materials

[19a-PB2-1~11] 6.4 New thin-film materials

Fri. Sep 19, 2014 9:30 AM - 11:30 AM PB2 (Gymnasium2)

ポスター掲示時間9:30～11:30(PB2会場)

9:30 AM - 11:30 AM

△ [19a-PB2-8] Effect of a buffer layer on crystallization of PLD grown Ga2O3 thin films

○Daiji Fukuda1, Daishi Shiojiri1, Ryosuke Yamauchi1, Nobuo Tsuchimine2, Masaya Oda3, Satoru Kaneko4,1, Akihumi Matsuda1, Mamoru Yoshimoto1 (Tokyo Inst. of Tech.1, TOSHIMA Manu. Co., Ltd.2, ROCA Co., Ltd.3, Kanagawa Ind. Tech. Center4)

Keywords:パルスレーザー堆積法,酸化ガリウム,エピタキシャル成長