[19a-PB2-1~11] 6.4 New thin-film materials

[19a-PB2-9] Insulating and dielectric properties of individual Ti_0.87O₂^0.52− nanosheets

^○(PC)Daisuke Ogawa^1,2,3, Kosho Akatsuka^1,3, Tomoteru Fukumura^2,3, Minoru Osada^1,3, Takayoshi Sasaki^1,3, Tetsuya Hasegawa^2,3,4 (NIMS¹, The University of Tokyo², JST-CREST³, KAST⁴)

Keywords:酸化物ナノシート,絶縁膜,微細加工