The 75th JSAP Autumn Meeting, 2014

Presentation information

Poster presentation

15. Crystal Engineering » 15.6 IV-group-based compounds

[19a-PB5-1~17] 15.6 IV-group-based compounds

Fri. Sep 19, 2014 9:30 AM - 11:30 AM PB5 (Gymnasium2)

ポスター掲示時間9:30~11:30(PB5会場)

9:30 AM - 11:30 AM

[19a-PB5-9] Carbon Desorption in SiC Thermal Oxide film by NF3 added Oxidation

○(M2)Masahito Nagoshi1, Ryu hasunuma1, Kikuo Yamabe1 (University of Tsukuba1)

Keywords:SiC,パワーデバイス,SiO2