[19a-S9-1~11] 8.3 Plasma deposition of thin film and surface treatment

[19a-S9-1] Preparation of Composite Thin Films by Sputtering Using Powder Target

^○Tamiko Ohshima¹, Takashi Maeda¹, Yuki Tanaka¹, Hiroharu Kawasaki¹, Yoshihito Yagyu¹, Yoshiaki Suda¹ (National Institute of Technology, Sasebo College¹)

Keywords:粉体ターゲット,複合薄膜