Uniform Deposition of Al doped ZnO Films Using Off-axis RF Magnetron Sputtering

Presentation information

Oral presentation

08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

Fri. Sep 19, 2014 9:00 AM - 12:00 PM S9 (S9)

9:15 AM - 9:30 AM

^○Yoshinobu Matsuda¹, Hironobu Yokoyama¹, Shunsuke Oyamada¹, Masanori Shinohara¹ (Nagasaki Univ.¹)

Keywords:Al添加ZnO,軸外し成膜,RFマグネトロン