[19a-S9-1~11] 8.3 Plasma deposition of thin film and surface treatment

[19a-S9-3] Preparation of the reduced light-induced degradation a-Si:H films using a multi-hollow-cathode plasma with balanced power feeding

^○Takaya Suzuki¹, Hiroshi Muta¹, Satashi Nishida¹, Shizuma Kuribayashi¹ (E.R.E.S Graduate School of Eng., Gifu Univ.¹)

Keywords:薄膜太陽電池