The 75th JSAP Autumn Meeting, 2014

Presentation information

Oral presentation

08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[19a-S9-1~11] 8.3 Plasma deposition of thin film and surface treatment

Fri. Sep 19, 2014 9:00 AM - 12:00 PM S9 (S9)

11:00 AM - 11:15 AM

[19a-S9-8] Surface Chemistry and doping efficiency of silicon nanocrystals

Michihiro Sugaya1, Ding Yi1, Zhou Shu1, Tomohiro Nozaki1 (Titech1)

Keywords:シリコンナノ粒子