The 75th JSAP Autumn Meeting, 2014

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Oral presentation

08. Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[19a-S9-1~11] 8.3 Plasma deposition of thin film and surface treatment

Fri. Sep 19, 2014 9:00 AM - 12:00 PM S9 (S9)

10:45 AM - 11:00 AM

[19a-S9-7] Interfacial Strain of Graphene with Atomic Layer Deposition

○Takeshi Kitajima1, Toshiki Nakano1 (Nat. Def. Acad.1)

Keywords:グラフェン,ALD