[19p-A10-1~22] 6.3 Oxide-based electronics

[19p-A10-22] Selective growth of Wadsley phase V₆O₁₃ and VO₂(B) thin films on metal and Si substrate

^○BintiAzhan NurulHanis¹, Kunio Okimura¹ (Tokai Univ.¹)

Keywords:ニ酸化バナジウム,反応性スパッタ法,ポストあにーる