Evaluation of Crystal Defect in β-Ga2O3 Crystal

Presentation information

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

Fri. Sep 19, 2014 1:15 PM - 5:45 PM A12 (E301)

4:00 PM - 4:15 PM

^○Tetsuya Nagai¹, Kengo Noami¹, Katsuhiko Nakai¹, Toshiro Futagi¹ (NIPPON STEEL & SUMIKIN Technology¹)

Keywords:酸化ガリウム,defect,TEM