The 75th JSAP Autumn Meeting, 2014

Presentation information

Print

Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[19p-A12-1~16] Nanocarbon Technology

Fri. Sep 19, 2014 1:15 PM - 5:45 PM A12 (E301)

4:15 PM - 4:30 PM

[19p-A12-11] Formation of β-Ga2O3 films by atmospheric pressure plasma enhanced CVD II

○(M1)Takuya Kiguchi1, Yukinori Nose1, Thuyoshi Uehara2, Norifumi Fujimura1 (Osaka Pref.Univ.1, Sekisui Integrated Research Inc.2)

Keywords:酸化ガリウム,大気圧プラズマ,CVD