The 75th JSAP Autumn Meeting, 2014

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Oral presentation

15. Crystal Engineering » 15.5 IV-group crystals and IV-IV-group mixed crystals

[19p-A16-1~18] 15.5 IV-group crystals and IV-IV-group mixed crystals

Fri. Sep 19, 2014 1:30 PM - 6:15 PM A16 (E307)

2:15 PM - 2:30 PM

[19p-A16-4] Formation of GeSn layers on Si substrates by sputter epitaxy method

○Takahiro Tsukamoto1, Nobumitsu Hirose2, Akifumi Kasamatsu2, Takashi Mimura2, Toshiaki Matsui2, Yoshiyuki Suda1 (Tokyo Univ. Agric. Technol.1, NICT2)

Keywords:スパッタエピタキシー,ゲルマニウムスズ