[19p-A17-1~11] 13.2 Insulator technology

[19p-A17-5] Effects of Oxygen radical irradiation on the electrical properties of Al₂O₃/GeO₂/p-Ge

^○Yohei Otani¹, Kosei Yanachi¹, Tomoya Yokohira¹, Daichi Yamada¹, Keita Seki², Tetsuya Sato², Yukio Fukuda¹ (Tokyo Univ. of Science, Suwa¹, Univ. of Yamanashi²)

Keywords:酸素ラジカル,原子状酸素,マイクロ波