The 75th JSAP Autumn Meeting, 2014

Presentation information

Print

Oral presentation

13. Semiconductors A (Silicon) » 13.2 Insulator technology

[19p-A17-1~11] 13.2 Insulator technology

Fri. Sep 19, 2014 2:00 PM - 5:00 PM A17 (E308)

4:00 PM - 4:15 PM

[19p-A17-8] Fabrication and Evaluation of Germanium Oxide Film made by CVD process

○(M2)Yuto Matsuoka1, Yositaka Iwasaki1, Tomo Ueno1 (TUAT1)

Keywords:半導体,ゲルマニウム,TEOG