Control Etching Profile of Organic Low-k Film with Control Substrate Temperature

Presentation information

Oral presentation

08. Plasma Electronics » 8.4 Plasma etching

Fri. Sep 19, 2014 2:15 PM - 7:00 PM S10 (S10)

3:15 PM - 3:30 PM

^○Yusuke Fukunaga¹, Takayoshi Tsutsumi¹, Keigo Takeda¹, Kenji Ishikawa¹, Hiroki Kondo¹, Makoto Sekine¹, Masaru Hori¹ (Nagoya Univ.¹)

Keywords:エッチング,基板温度計測