[20a-A19-1~12] 13.3 Si Process・Interconnect・MEMS・Integration

[20a-A19-11] Half-Inch Silicon CVD Reactor Using Concentrated Infrared Light Heater(III)

^○Ning Li¹, Hitoshi Habuka¹, Shin-ichi Ikeda², Yuuki Ishida², Shiro Hara² (Yokohama Nat. Univ.¹, AIST²)

Keywords:Minimal manufacturing