[20a-A20-1~15] 15.8 Crystal evaluation, impurities and crystal defects

[20a-A20-13] Effects of Light Element Ion Beam Implantation on Transition Metal Impurities Proximity Gettering in Silicon Wafers (2)

^○Yoshihiro Koga¹, Kazunari Kurita¹ (SUMCO Corporation¹)

Keywords:炭素，水素，注入，ゲッタリング，シリコン．