The 75th JSAP Autumn Meeting, 2014

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Oral presentation

16. Amorphous and Microcrystalline Materials » 16.2 Processing technologies and devices

[20a-A25-6~13] 16.2 Processing technologies and devices

Sat. Sep 20, 2014 10:30 AM - 12:30 PM A25 (E318)

12:15 PM - 12:30 PM

[20a-A25-13] Production mechanism of B atoms and BH radicals from B2H6 on heated W wires

○Hironobu Umemoto1,2, Taijiro Kanemitsu1,2 (Shizuoka Univ.1, JST CREST2)

Keywords:ジボラン,ドーピング,Cat-CVD