9:30 AM - 11:30 AM
△ [20a-PA3-2] A direct correlation between core-level shifts and surface morphology in SiON layer
Keywords:シリコン酸窒化膜,内殻準位化学シフト,表面モフォロジー
Presentation information
Poster presentation
13. Semiconductors A (Silicon) » 13.2 Insulator technology
[20a-PA3-1~7] 13.2 Insulator technology
Sat. Sep 20, 2014 9:30 AM - 11:30 AM PA3 (Gymnasium1)
ポスター掲示時間9:30～11:30(PA3会場)