The 75th JSAP Autumn Meeting, 2014

Presentation information

Poster presentation

13. Semiconductors A (Silicon) » 13.2 Insulator technology

[20a-PA3-1~7] 13.2 Insulator technology

Sat. Sep 20, 2014 9:30 AM - 11:30 AM PA3 (Gymnasium1)

ポスター掲示時間9:30~11:30(PA3会場)

9:30 AM - 11:30 AM

[20a-PA3-7] Nano-contact Heteroepitaxy of GaSb on Si(001) and the HfO2/GaSb MOS Characteristics

Noriyuki Miyata1, Akihiro Ohtake2, Masakazu Ichikawa3, Takahiro Mori1, Tetsuji Yasuda1 (AIST1, NIMS2, Univ. Tokyo3)

Keywords:高移動度チャネル,ヘテロエピ成長,MOS界面