The 61st JSAP Spring Meeting, 2014

Session information

Oral presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[19a-E14-1~10] 13.3 Si Process・Interconnect・MEMS・Integration

Wed. Mar 19, 2014 9:00 AM - 11:45 AM E14 (E302)

△:Young Scientist Oral Presentation Award Applied
▲:English Presentation
▼:Both Award Applied and English Presentation

9:45 AM - 10:00 AM

Kouya Sugihara1, Kiyoharu Shimoda1, Tatsuya Okada1, Takashi Noguchi1, Takahiro Miyashita2, Yutaka Kusuda2, Shinichi Motoyama2 (Univ. of the Ryukyus1, SAMCO Inc.2)

Break 10:15〜10:30 (10:15 AM - 10:30 AM)