Oral presentation

[17p-F3-1~16] 8.1 Plasma production and control

Mon. Mar 17, 2014 2:00 PM - 6:15 PM F3 (F301)

△：Young Scientist Oral Presentation Award Applied
▲：English Presentation
▼：Both Award Applied and English Presentation

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2:00 PM - 2:15 PM

△ [17p-F3-1] Spatial Variations of Pulsed Microwave Exited Line Plasma at Atmospheric-Pressure

^○Haruka Suzuki¹, Suguru Nakano¹, Hitoshi Itoh^2,3, Makoto Sekine^1,2, Masaru Hori^1,2, Hirotaka Toyoda^1,2 (Nagoya Univ.¹, PLANT, Nagoya Univ.², TEL³)

2:15 PM - 2:30 PM

[17p-F3-2] Uniformity Evaluation of Microwave Meter-Scale Line Plasmas

^○Suguru Nakano¹, Haruka Suzuki¹, Hitoshi Itoh^2,3, Makoto Sekine^1,2, Masaru Hori^1,2, Hirotaka Toyoda^1,2 (Nagoya Univ.¹, PLANT, Nagoya Univ.², Tokyo Electron Ltd.³)

2:30 PM - 2:45 PM

[17p-F3-3] High density narrow tube ozonizer by increased barrier discharge frequency

Junji Tsujino¹, ^○Takeshi Kitajima¹, Toshiki Nakano¹ (Nat. Def. Acad.¹)

2:45 PM - 3:00 PM

[17p-F3-4] Analysis of Airflow Induced in Dielectric Barrier Discharge Plasma Actuator

^○Takuya Kobatake¹, Junya Suzuki², Masanori Deguchi², Yoshinori Takao², Koji Eriguchi², Kouichi Ono² (Kyoto Univ.¹, Kyoto Univ.²)

3:00 PM - 3:15 PM

△ [17p-F3-5] Multi-charged ion beam extracted from the 2nd stage in the tandem type ECRIS

^○（M2）Keisuke Yano¹, Daiju Kimura¹, Sho Kumakura¹, Youta Imai¹, Takuya Nishiokada², Fuminobu Sato¹, Yushi Kato¹, Toshiyuki Iida¹ (Osaka Univ.¹, Osaka Univ.²)

3:15 PM - 3:30 PM

[17p-F3-6] Relation between electron energy distribution function in ECR plasma and charge state distribution of multi-charged ion beam extracted from ECRIS

^○Sho Kumakura¹, Daiju Kimura¹, Keisuke Yano¹, Youta Imai¹, Takuya Nishiokada¹, Fuminobu Sato¹, Yushi Kato¹, Toshiyuki Iida¹ (Osaka Univ.¹)

3:30 PM - 3:45 PM

[17p-F3-7] Improvement of electrodes for extraction of ion beam on ECRIS

^○Daiju Kimura¹, Keisuke Yano¹, Sho Kumakura¹, Youta Imai¹, Takuya Nishiokada², Fuminobu Sato¹, Yushi Kato¹, Toshiyuki Iida¹ (Osaka Univ.¹, Osaka Univ.²)

3:45 PM - 4:00 PM

[17p-F3-8] Effect of Mid-electrode potential on multi-charged ion beam extracted from ECRIS

^○Youta Imai¹, Daiju Kimura¹, Keisuke Yano¹, Sho Kumakura¹, Takuya Nishiokada², Fuminobu Sato¹, Yushi Kato¹, Atushi Kitagawa³, Toshiyuki Iida¹ (Osaka Univ.¹, Osaka Univ.², NIRS³)

Break 16:00〜16:15 （4:00 PM - 4:15 PM）

4:15 PM - 4:30 PM

△ [17p-F3-9] Energy distributions of particles striking on the cathode in Ar and He DC discharges simulated by PIC-MCC method

^○Takahiro Kondo¹, Tsuyohito Ito¹ (Osaka Univ.¹)

4:30 PM - 4:45 PM

[17p-F3-10] Two-dimensional Analysis of Capacitive-coupled RF Discharge using Finite Element Method

^○Tong Lizhu¹ (KESCO¹)

4:45 PM - 5:00 PM

[17p-F3-11] Investigation of Caluclating Method for Electric Potential Distribution in Ion-Source by Electron Fluid Model

^○Masaru Miyashita¹, Haruhiko Etoh¹, Yasushi Aoki¹, Takanori Kato¹ (SHI¹)

5:00 PM - 5:15 PM

△ [17p-F3-12] Two-dimensional atomic absorption spectroscopy of metal atom derived electrolyte solution in pulsed DC plasma with electrolyte electrode

^○Takafumi Takaba¹, Haruka Suzuki¹, Noriharu Takada¹, Hirotaka Toyoda^1,2 (Nagoya Univ.¹, PLANT, Nagoya Univ.²)

5:15 PM - 5:30 PM

[17p-F3-13] Evaluating Treatment Performance of Flowing Liquid Contiguous to Microwave Plasma

^○Michiko Ito^1,3, Tomohiro Takahashi¹, Seigo Takashima³, Norio Nomura⁴, Tominori Kitagawa⁴, Hirotaka Toyoda^1,2 (Nagoya Univ.¹, Plasma Nanotechnology Research Center, Nagoya Univ.², Plasma Center for Industrial Applications³, Sanshin Mfg. Co., Ltd.⁴)

5:30 PM - 5:45 PM

[17p-F3-14] Study on Water Treatment by Bubbling of Plasma Radical Flows [2]

^○Hiroyuki Yoshiki¹, Shin Itagaki¹, Yu Igarashi¹ (Tsuruoka Natl. Coll. of Tech.¹)

5:45 PM - 6:00 PM

△ [17p-F3-15] Cryoplasma Chemistry in He/N2 Gas below Temperature of Liquid Nitrogen (77 K)

^○Hitoshi Muneoka¹, Keiichiro Urabe¹, Sven Stauss¹, Kazuo Terashima¹ (Univ. Tokyo¹)

6:00 PM - 6:15 PM

△ [17p-F3-16] Control of Ionization Rates and Energy Distribution of Deposition Particles in Reactive Plasma Deposition Equipment

^○Hisashi Kitami¹, Masaru Mitashita¹, Toshiyuki Sakemi¹, Yasushi Aoki¹, Takanori Kato¹ (Sumitomo Heavy Industries, Ltd.¹)

Poster presentation

[19a-PA3-1~2] 8.1 Plasma production and control

Wed. Mar 19, 2014 9:30 AM - 11:30 AM PA3 (アリーナ)