[17a-E10-1~11] Nanocarbon Technology

[17a-E10-2] Influence of Oxygen Partial Pressure Ratio on RF Sputtered ZnO Thin Films

^○Dai Abe¹, Tatsuya Mori², Hiroshi Chiba², Syuhei Okuda², Tomoyuki Kawashima^1,2, Katsuyoshi Washio^1,2 (Tohoku Univ¹, Tohoku Univ²)

Keywords:酸化亜鉛,マグネトロンスパッタ法,Ar/O2