The 61st JSAP Spring Meeting, 2014

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Oral presentation

Joint Session K "Wide bandgap oxide semiconductor materials and devices" » Nanocarbon Technology

[17a-E10-1~11] Nanocarbon Technology

Mon. Mar 17, 2014 9:00 AM - 12:00 PM E10 (E204)

9:45 AM - 10:00 AM

[17a-E10-4] Chemical Vapor Deposition of ZnO Films using Remote Plasma Generated near Atmospheric Pressure

○（D）Yukinori Nose1, Takuya Kiguchi1, Tatsuru Nakamura1, Takeshi Yoshimura1, Atsushi Ashida1, Tsuyoshi Uehara2, Norifumi Fujimura1 (Osaka Prefecture Univ.1, SEKISUI CHEMICAL CO., LTD.2)

Keywords:酸化亜鉛,化学気相成長,大気圧プラズマ