[17a-E10-1~11] Nanocarbon Technology

[17a-E10-6] Fabrication of a planer cavity using a single-crystalline ZnO as an active layer by the reactive helicon-wave-excited-plasma sputtering method

^○Kentaro Furusawa^1,2, Kento Kakihata^1,2, Masafumi Koyama^1,2, Shigefusa Chichibu^1,2 (Tohoku Univ.¹, Tohoku Univ.²)

Keywords:スパッタリング,励起子ポラリトン