[17a-F3-1~6] 7.5 Particle/photon-beam-induced surface reactions

△ [17a-F3-4] The resistance of Ti-doped DLC Films against Hyperthermal Atomic Oxygen Exposure

^○Kengo Kidena¹, Minami Endo¹, Ryo Imai¹, Masahito Niibe¹, Kumiko Yokota², Masahito Tagawa², Yuichi Furuyama³, Keiji Komatsu⁴, Hidetoshi Saitoh⁴, Kazuhiro Kanda¹ (LASTI, Univ. of Hyogo¹, Graduate School of Eng., Kobe Univ.², Graduate School of Maritime Sci., Kobe Univ.³, Nagaoka Univ. of Tech.⁴)

Keywords:DLC